SPECS EnviroESCA, XPS, UPS, ESCA system, UHV scanning probe microscope, VT-STM

SPECS Surface Nano Analysis GmbH headquarters is situated in the centre of Germany’s capital Berlin, with subsidiaries in Switzerland, USA and China. SPECS has attracted a talented team of scientists and engineers who have dedicated their knowledge and experience to the development, design, and production of instruments for surface science, materials research, and nanotechnology for almost 30 years. In order to continuously improve performance and keep abreast of the latest developments, we are in contact with numerous scientists, users and customers from all over the world. Reliable quality control (ISO 9001 certified) and excellent fast service, both remote and on-site, ensures maximum uptime and long-term operation and reliability of specs instruments over many years. Our systems are based on methods such as XPS, UPS, AES, ISS, STM, LEEM/PEEM, LEED, RHEED and deposition.

SPECS Systems

Electron Spectroscopy for Chemical Analysis under Environmental Conditions

Building on our pioneering developments of recent years SPECS proudly presents EnviroESCA. This novel and smart analysis tool overcomes the barriers of standard XPS systems by enabling analyses at pressures far above UHV. EnviroESCA is designed for high-throughput analysis and opens up new applications in the fields of medical technology, biotechnology and the life sciences. It offers the shortest loading-to-measurement time on samples of all types including liquids, tissue, plastics and foils, powders, soil, zeolites, rocks, minerals and ceramics. The system is can be loaded with multiple samples, or a single sample up to Ø 60 mm and 40 mm in height

SPECS is the market leader in near-ambient pressure photoelectron spectroscopy which seeks to bridge the pressure gap between traditional UHV and more realistic conditions closer to atmospheric pressure.


The FlexMod system concept provides the scientist with an optimised and yet still custom-configurable solution for a variety of surface science techniques. The system allows you to start with a basic configuration and expand with upgrade options for higher performance and additional surface science methods. This means the system can grow with you and your needs.

The individual modules are designed for optimised functionality for the chosen method. Within the module it is possible to choose from a large number of components for analysis. In addition, we offer several choices for pumping configuration and sample manipulation which allow you to adapt the system to your needs. Individual modules can be operated as standalone systems or be combined from multimethod system configurations.


The SPECS LEEM instrument FE-LEEM P90 is a next generation Low Energy Electron Microscope with unsurpassed 5 nm resolution for dynamic LEEM microscopy experiments. With this instrument, based on the design of Dr. Rudolf Tromp, nanometer scale processes on surfaces can be observed in real-time.

SPECS Components

Electron Spectrometers

A New Generation of Hemispherical Energy Analyzers for Electron and Ion Spectroscopy

Nanotechnology is focused on the engineering and the physical properties of small structures. Therefore techniques that have sensitivities at a scale of 0.1 nm to 100 nm are required to study these structures. Different methods of electron spectroscopy (XPS, UPS and AES) have a sensitivity in this range and are therefore key techniques in nanoscience.Thanks to our high level of expertise in electron optics and electronics we can offer electron spectrometers with the highest resolution and transmission possible.

Scanning Probe Microscopy

As Scanning Probe Microscopy (SPM) is a key tool for nanotechnology, SPECS offers dedicated solutions for highly demanding requirements.With the highly robust STM Aarhus 150 reflecting the very successful scanning tunneling microscopy (STM) developments with the University of Aarhus, SPECS further developed this proven concept throughout their collaboration together. From the STM Aarhus 150 to the SPM Aarhus 150 , SPECS offers several highly sophisticated options within the Aarhus SPM series including fast scanning, high temperature, AFM based on the unique Kolibrisensor and Nanonis control systems.


Nanonis SPM Control Systems

Unbound to any specific microscope, the Nanonis SPM Control System is designed for the uncompromising demands of scientific excellence in a wide variety of SPM applications. Its modular concept implemented in a fully digital fashion is carefully thought through, with a strong emphasis on usability, stability and flexibility.

Diffraction: LEED and RHEED

Low Energy Electron Diffraction (LEED) is one of the most powerful methods to determine surface structures. Analysis of LEED patterns and intensities provides the size and shape of the surface unit cell, the degree of order, and detailed atomic structure with a precision of the order of picometers. To exploit the full power of the technique, equally capable instrumentation is required. SPECS LEED systems together with highly sophisticated acquisition and analysis solutions provide the experimenter with many unique advantages present in no other commercial unit.

Capable of being operated over a wide range of pressures RHEED is the method of choice in a variety of applications regarding thin film growth, surface coating and material deposition techniques. RHEED thereby allows to determine the surface structure at any time before, during, and after the growth process, as well as to monitor the growth process itself. SPECS RHEED components combine stability and longevity together with reliable performance. Sophisticated acquisition and analysis solutions complete our product portfolio.



Plasma Sources SPECS offers a range of solutions for surface modification during deposition, sample cleaning or assisting surface treatment with inert or reactive atom or ion species. Since Scanwel also offers effusion cells from CreaTec as well as e-beam evaporators, LEED and RHEED from SPECS and CreaTec, we have a complete range of solutions for your deposition requirements. Sources include plasma cracker sources based on electron cyclotron resonance (ECR) and radio frequency technology, and simple thermal cracker sources. These can be adapted for a range of flange sizes, starting from as small as DN40CF.      

Ion Sources

SPECS offers a range of ion sources for different applications including sample cleaning, depth profiling, SIMS, SNMS or ISS. We can advise on the most appropriate source based on your requirements for beam energy, current and beam profile. We can offer anything from a flat-topped beam profile for best uniformity on larger samples to a 125 micron beam with rastering capability.


X-Ray Sources
SPECS offers a range of X-Ray sources, both dual anode and monochromatic for X-Ray Photoelectron Spectroscopy (XPS) applications. The dual anode XR50 source is optimised to provide the highest possible intensity while minimising the thermal load at the sample, and can be fitted with a wide range of user-interchangeable anode materials. The monochromated Focus500 uses a specially designed source to generate Al Kα and Ag Lα X-rays coupled with an ellipsoidal X-ray mirror. By transmitting only the X-Rays reflected from the mirror at a specific angle of reflection, a monochromatic X-Ray beam with extremely high energy resolution is generated.

UV Sources SPECS offers a range of UV sources suited for ultraviolet photoelectron spectroscopy (UPS) applications. The appropriate model can be selected from the range depending on required spot size, gas compatibility and whether a monochromator or polariser is required.

Electron Sources
SPECS manufactures two types of electron source. The first is for Auger Electron Spectroscopy (AES) applications offering a scannable beam with a small spot profile at energies up to 5keV. The second is a low energy flood-type source for charge neutralisation applications in photoelectron spectroscopy

Electron Beam Evaporator

SPECS offers mini e-beam evaporators with single or multiple pockets which are capable of evaporating small quantities of almost any material. The material either in rod form or in a crucible is heated by electron bombardment from the surrounding filament allowing temperatures in excess of 3000K to be reached. Up to 4 pockets can be fitted with a linear drive or fixed length holder or can be upgraded by the user later on if required. Furthermore, all pockets may be used individually or in any combination for true co-evaporation from crucible or in rod form with rod feed when the pocket is fitted with a linear drive. The instruments are  therefore highly flexible and are well suited to a wide range of surface science applications.



SPECS offers cutting edge software for its electron spectroscopy and scanning probe microscopy product lines. SpecsLab Prodigy sets a new standard in electron spectroscopy. The modular software concept allows 1-, 2- and 3-dimensional data handling, fully integrated with optional Remote Device Control and Experiment Automation. The Nanonis SPM software provides measurement methods and complete signal processing combined with a streamlined user interface, offering all necessary functionalities in an efficient workflow for demanding SPM experiments.