CreaTec Effusion cell, LT-STM, LT-AFM, LT-SPM, MBE Systems

CreaTec LT-STM, LT-AFM, LT-SPM, MBE Systems, Effusion cell

CreaTec product line

Growth Systems

CreaTec offers various UHV systems such as MBE systems for semiconductor-, metal- or oxide growth for research and industry. All systems are assembled under clean room conditions. Selected materials and chambers are used to guarantee high reliability and quality. CreaTec provides solutions for all kind of physical vapor deposition (PVD) applications.


Since 2000, the low-temperature scanning tunneling microscope (LT-STM) became an essential part of the CreaTec product range. In addition to its nanoanalytical capabilities it allows the precise manipulation of atoms and molecules at temperatures from 4 to 300 K.


CreaTec offers a great variety of evaporators. The following types of effusion cells are available:
TUBO Effusion Sources → TUBO | TUBO-e
Single Filament Cell (SFC) → SFC | SFC-HL
Low Temperature Cell (LTC) → LTC | LTC-HL | T-LTC | T-LTC-HL
Cold Lip Cell (CLC) → CLC-ST | CLC-W | CLC-CO
Dual Filament Cell (DFC)
High Temperature Cell (HTC) → HTC 1700 | HTC 2000
Cracker Cell (CRC) → CRC | V-CRC
Atomic Hydrogen Source (HLC)
Electron Beam Evaporator (EBE) EBE-ST | EBE-C | EBE-AX | EBE-L
Decomposition Effusion Cell (DECO) → DECO-P | V-DECO-P | DECO-As| V-DECO-As
Linear Effusion Cell (L-EC)
OLED Effusion Cell (OLED) → OLED | Triple OLED | Tetra OLED | OLED-HL
Ultra Low Temperature Cell (ULTC)

All evaporators are manufactured under clean room conditions (class 10–100). Selected materials are used for the evaporators ensuring high reliability for a long term operation.


CreaTec manufactures a large variety of UHV and MBE substrate manipulators according to customer specifications. The manipulators are designed for different types of sample holders and various substrate sizes. Temperatures up to 1300°C are standard. Special manipulators reaching higher temperatures (up to 1700°C) are available as well as cooling stages for liquid nitrogen and liquid helium.

RHEED System

A Reflection High-Energy Electron Diffraction (RHEED) system can be used as an in-situ characterization tool in Molecular Beam Epitaxy (MBE). CreaTec utilizes the RHEED System manufactured by Dr. Gassler Electron Devices. For a complete RHEED analysis, Createc provides additional equipment, including camera holderviewport shutter, RHEED screendigital camera and SAFIRE software package.

cVac | Control Software

The CreaTec Control Software is a software package for control, monitoring and automation of MBE and UHV systems. The software is created with the development environment IASOpen, which provides an IEC 61131-3 conform programming system, little hardware requirements, optimal performance as well as the possibility to integrate a large variety of devices.