Gas Admission

Gas Admission

Opposite is a view of the 8 MFC’s fitted to this system.
The MFC’s feed 6 separate gases to an independently pumped mixing chamber valved from the process chamber

All the gas lines can be independently pumped and purged and each MFC is fitted with an isolation valve.
A mix of high flow and ultra accurate MFC’s allows rapid chamber filling with ppm concentration accuracy.

The user interface integrates the MFC recipes with the main system control routines for optimum experimental control and flexibility.

Above is the user interface for recipes
This is a fully automated routine that allows control over gas mix, pump purge cycles
and backfill pressure.
Recipes can be save and recalled for future use.

Above is the user interface for topping up or adding additional gasses to the current system.