Modules
for
Secondary Ion Mass Spectrometry
and Sputtered Neutral Mass Spectrometry
Both modules (for add-on to existing instruments)
and complete systems are available, for SIMS, SIMS/RGA and Thermal
Desorption Analysis. Secondary Neutral Mass Spectrometry (SNMS)
is available from the SSM 200 package.
Secondary
Ion Mass Spectrometer Module, SIMS 30/63
is a mass spectrometer sub-system for Secondary Ion (SIMS)
and Residual Gas and Thermal Desorption Analysis. SIMS 30/63
combines high sensivity for trace analysis with an excellent
dynamic range, such as is required in depth profiling experiments.
Its main features include:
excellent performance in both static and dynamic SIMS
Quadrupole mass filter with combined RGA and SIMS optics
and 90° off axis multiplier
Secondary Neutral and Ion
Mass Spectrometer Module SSM 200
is a mass spectrometer sub-system for Secondary Neutral
(SNMS), Secondary Ion (SIMS) and Residual Gas and Thermal
Desorption Mass Analysis. The SSM 200 enables application
of all these methods available in one instrument without
compromise.
Its main features are:
high sensivity in SNMS mode by efficient electron beam
postionizer configuration
excellent performance in both static and dynamic SIMS
quasimultaneous operation of all analytical modes
full in situ compatibility with electron spectroscopy
(XPS, SSXPS, AES, SAM) in single or multiposition analysis
systems
high dynamic range in all analytical modes by ionizer
and advanced transfer optics and energy filter design
manual, semiautomatic and computer controlled operation
of all instruments parameters
Mass Range: 1 to 511 amu (2 to 1023 amu optional)
Ionizer: Cross beam electron impact ionizer, one and two
filament operation, emission current controlled (0 - 5 mA),
integrated secondary ion and residual gas suppresion system
Ion optics: lens sytem with spherical energy filter and
variable energy bandwidth, post-quadrupole focusing and
deflection lens
Detection system: positve / negative counting CuBe multiplier
handles count rates in excess of 5.000.000 cps
Electronics: microprocessor controlled ionizer and optics
power supply with internal memory to store up to 10 parameter
sets and programmable energy sweep
